SUSS MicroTec enters wafer cleaning market with GT200 system
Semiconductor equipment supplier SUSS MicroTec entered the wafer level cleaning sector by launching its GreenTec Solutions product portfolio alongside the GT200 processing system in Germany
GARCHING, Germany — SUSS MicroTec SE has entered the burgeoning wafer-level cleaning market with the introduction of its first system, the GT200, as part of its GreenTec Solutions product line. This expansion highlights SUSS's commitment to sustainability and process excellence, aligning with its Ambition 2030 strategy. The new system combines SUSS's TurbulenStrip™ and CrustBuster™ technologies in a single platform, offering efficient residue removal while reducing chemical consumption and hazardous waste.
The GT200 is designed for research and development, process qualification, and production in 200 mm manufacturing environments for various semiconductor applications. SUSS will continue to expand its GreenTec platform towards high-volume manufacturing, with a dedicated 300 mm solution slated for 2027.
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