Center for Technology & Statecraft: Chinese fabs had acquired ~343 DUVi tools by early 2026, with ~270 from ASML; DUVi can be adapted to make 7nm chips and HBM (Howard Liu/South China Morning Post)
DUV tools, though not as advanced as EUV, can be adapted to manufacture 7-nm logic chips and advanced memory for AI processors, report says.
By early 2026, Chinese semiconductor plants had acquired approximately 343 deep ultraviolet immersion lithography systems, with around 270 of these tools originating from ASML. The Centre for Technology & Statecraft (CTS) released a report in late September detailing this data, co-authored by former US export control officials Nicholas Brown and Saif Khan.
The study examined the impact of Western export restrictions on Chinese fabs and urged Washington and allies to enforce a total blockade on immersion DUV tools destined for China. Although Chinese chipmakers have largely relied on immersion DUV systems, which are currently exempt from Western export bans, to produce advanced semiconductors, these tools can be adapted to manufacture 7-nanometre-class logic chips and memory for AI processors like Huawei Technologies' Ascend series.
Chinese fabs spent over $13 billion acquiring 90 NXT:1980i immersion DUV systems in 2024 and another 89 in 2025, accounting for 41% and 33% of ASML's net system sales by destination in 2024 and 2025, respectively. However, shipments to China have since decreased to 19% in the first quarter and 14% in the second quarter of 2026. The authors of the report recommended a complete ban on immersion DUV equipment for China and restrictions on replacement parts and servicing for advanced facilities, citing the potential for these tools to be repurposed or relocated to more advanced production lines.
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