Chinese chipmaking tool roadmaps examined — Beijing's nascent lithography tools target DUV production at five machines a year, and an EUV prototype with no chips
Ultimately, three markers will indicate whether China’s domestic DUV program is a legitimate rival or yet more state-sanctioned hot air.
China has begun limited production of domestically-made lithography machines for immersion deep ultraviolet (DUV) production, with plans for around five systems in 2025 and approximately 20 units in 2027. This move came after a July 27 report which caused a $44 billion drop in ASML's share value. The primary manufacturer behind these Chinese tools is Shanghai Aishengna Electronic Technology Group (SAETG), a state-owned firm founded in August 2023 with a $1 billion capital investment.
SAETG absorbed engineering teams from Huawei-affiliated startup Yuliangsheng and state scanner maker SMEE.
The first units are currently being tested at semiconductor assembly and packaging companies SMIC, Hua Hong, and CXMT for production line validation. However, these machines fall short of ASML's models and require further testing. With five machines representing about 3.8% of ASML's typical 130 immersion systems used each year, China's lithography tools are capable of printing 28nm-class features in single exposures, reaching 7nm, and potentially even 5nm through multipatterning.
Neither SAETG nor SMIC has confirmed the report, nor have they publicly shown any machines or disclosed throughput or overlay figures. SMIC has been running its domestic immersion scanner, developed under the code name Mount Everest, since September 2024, with production line integration targeted for 2027 after qualification. Yuliangsheng, founded in Shanghai in 2022 with a $149 million capital investment, delivered three lithography machines to fabs for testing by late last year, though this hasn't been officially confirmed.
Despite delays in obtaining critical components from Japan, the goal of producing 20 machines by 2027 remains ambitious, relying on a domestic component base that hasn't been established yet. The current 18% litho localization rate in Chinese fab purchases also indicates there is significant room for improvement.
Written by urgent.news from Tom's Hardware's reporting — not their text. Machine-written — may contain errors; check the original before relying on it.
